A new method for non-destructive measuring of grating parameters.
| Autor: | Sheng, Yunlong, Zhou, Changhe, Cao, Liangcai, Muhutijiang, Bilali, Wei, Wei, Qiu, Keqiang |
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| Zdroj: | Proceedings of SPIE; 9/8/2019, Vol. 11188, p1118825-1118825, 1p |
| Databáze: | Complementary Index |
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