A new excimer lamp model of Institute of High Current Electronics.
| Autor: | Tarasenko, Victor F., Klimkin, Anton V., Trigub, Maxim V., Avdeev, Sergey M., Panarin, Victor A., Skakun, Victor S., Sosnin, Eduard A. |
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| Zdroj: | Proceedings of SPIE; 1/20/2020, Vol. 11322, p1132227-1132227, 1p |
| Databáze: | Complementary Index |
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