Autor: |
Alalykin, A. S., Krylov, P. N., Zakirova, R. M., Fedotova, I. V., Kostenkov, N. V., Durman, E. A. |
Zdroj: |
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Nov2019, Vol. 13 Issue 6, p1103-1107, 5p |
Abstrakt: |
The effect of accompanying ion-beam treatment on the structure and properties of SnO2 films synthesized by the method of high-frequency magnetron sputtering at room temperature and at 200°C is investigated. It is established that ion-beam processing does not affect the transparency and the band gap of the obtained tin-oxide films. The refractive index and resistivity change. At room temperature, the films are X‑ray amorphous, and at 200°C they are polycrystalline. X-ray diffraction and electron diffraction studies show the presence of a single phase of SnO2. Ion-beam treatment leads to a change in the preferred orientation of the crystallites. With increasing current of ion-beam processing, the grain sizes decrease. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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