A method to discriminate between upper and lower side material removal in double-side polishing.
Autor: | Maunier, C., Redien, M., Da Costa Fernandes, B., Neauport, J. |
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Zdroj: | Proceedings of SPIE; 8/26/2019, Vol. 11175, p1-7, 7p |
Databáze: | Complementary Index |
Externí odkaz: |