| Autor: |
Cheng-Ta Ko, Yang, Henry, Lau, John, Ming Li, Margie Li, Lin, Curry, Lin, J. W., Chieh-Lin Chang, Jhih-Yuan Pan, Hsing-Hui Wu, Yu-Hua Chen, Chen, Tony, Xu, Iris, Lo, Penny, Fan, Nelson, Kuah, Eric, Zhang Li, Kim Hwee Tan, Chia-Hung Lin, Beica, Rozalia |
| Předmět: |
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| Zdroj: |
Journal of Microelectronic & Electronic Packaging; Oct2018, Vol. 15 Issue 4, p141-147, 7p |
| Abstrakt: |
The design, materials, process, and fabrication of a heterogeneous integration of four chips by a fan-out panel-level packaging (FOPLP) method are investigated in this study. Emphasis is placed on (1) the application of a dry-film epoxy molding compound for molding the chips and (2) the application of a special assembly process called uni-substrate-integrated package for fabricating the redistribution layers (RDLs) of the FOPLP. The Ajinomoto build-up film is used as the dielectric of the RDLs and is built up by the semiadditive process. Electroless Cu is used to make the seed layer, laser direct imaging is used for opening the photoresist, and printed circuit board (PCB) Cu plating is used for making the conductor wiring of the RDLs. The panel dimensions are 5083508 mm. The package dimensions of the FOPLP are 103 10 mm. The large chip size and the small chip sizes are, respectively, 5×5 mmand 3×3 mm. The uniqueness of this study is that all the processes are carried out by using the PCB equipment. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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