Analysis of the Influence of Technological Parameters on Electrophysical and Frequency Characteristics of RF MEMS.
| Autor: | Belevtsev, Andrey M., Epaneshnikova, Irina K., Kruchkov, Vasiliy L., Dryagin, Ivan O., Lukichev, Vladimir F., Boldyreff, Anton S. |
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| Zdroj: | Proceedings of SPIE; 8/14/2019, Vol. 11163, p111630L-1-111630L-9, 9p |
| Databáze: | Complementary Index |
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