| Autor: |
Popov, A. I., Afanas'ev, V. P., Barinov, A. D., Bodisko, Yu. N., Gryazev, A. S., Miroshnikova, I. N., Presnyakov, M. Yu., Shupegin, M. L. |
| Zdroj: |
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Sep2019, Vol. 13 Issue 5, p832-835, 4p |
| Abstrakt: |
Using scanning electron microscopy and X-ray photoelectron spectroscopy, we investigate the chemical forms of tungsten incorporated into diamond-like silicon–carbon films. The films are fabricated by simultaneously carrying out the plasmochemical decomposition of a silicon organic precursor and magnetron sputtering of the metal. Films of tungsten-containing diamond-like silicon–carbon nanocomposites are found to contain a considerable amount of the amorphous phase of tungsten oxide, along with nanocrystalline tungsten carbide. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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