Design and fabrication of AlN-on-Si chirped surface acoustic wave resonators for label-free cell detection.
Autor: | I Syamsu, T Granz, G Scholz, S Mariana, N Yulianto, L Daul, L Koenders, K Triyana, J Daniel Prades, E Peiner, A Waag, H S Wasisto |
---|---|
Zdroj: | Journal of Physics: Conference Series; 2019, Vol. 1319 Issue 1, p1-1, 1p |
Databáze: | Complementary Index |
Externí odkaz: |