Achievement of highly uniform Si crystallization using a spot beam laser steering method.
Autor: | Min Jin Kang, Tae Sang Park, Byoung-Ho Cheong |
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Zdroj: | Proceedings of SPIE; 6/1/2019, Vol. 11089, p1-6, 6p |
Databáze: | Complementary Index |
Externí odkaz: |