Scale spanning subnanometer metrology up to ten decades.
| Autor: | Manske, Eberhard, Fröhlich, Thomas, Füßl, Roland, Mastylo, Rostyslav, Blumröder, Ulrike, Köchert, Paul, Birli, Oliver, Ortlepp, Ingo, Pruss, Christof, Schwesinger, Folker, Meister, Andreas |
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| Zdroj: | Proceedings of SPIE; 4/29/2019, Vol. 11056, p1-7, 7p |
| Databáze: | Complementary Index |
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