Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019).

Autor: Dorsey, Kyle J., Pearson, Tanner G., Esposito, Edward, Russell, Sierra, Bircan, Baris, Han, Yimo, Miskin, Marc Z., Muller, David A., Cohen, Itai, McEuen, Paul L.
Zdroj: Advanced Materials; Jul2019, Vol. 31 Issue 29, pN.PAG-N.PAG, 1p
Databáze: Complementary Index
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