Autor: |
Boruzdina, A. B., Gerasimov, Yu. M., Grigor'ev, N. G., Kobylyatskii, A. V., Ulanova, A. V., Shvetsov-Shilovskii, I. I. |
Předmět: |
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Zdroj: |
Russian Microelectronics; Jul2019, Vol. 48 Issue 4, p268-272, 5p |
Abstrakt: |
This article deals with a study of radiation-induced leakages between n-regions of various types using test structures fabricated according to the 0.18-µm CMOS technology. It is shown that, depending on the radiation exposure dose, the leakages between the n+-regions and the n-well may exceed the leakages between the n+-regions by 3–9 times, which should be taken into consideration when developing radiation resistant VSHICs. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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