Automated discrimination of surface imperfections and adhered particles on customer-specific optical elements.

Autor: Schöch, Alexander, Perez, Patric, Linz-Dittrich, Sabine, Bach, Carlo, Ziolek, Carsten
Předmět:
Zdroj: Technisches Messen; Jul2019, Vol. 86 Issue 7/8, p399-403, 5p
Databáze: Complementary Index