EUV Line-Space Pattern Defect Mitigation Simulation Using Coventor SEMulator3D® to Enable Exposure Dose Reduction.
| Autor: | Sobieski, Daniel, Wise, Rich, Yang Pan, Fried, David, Jengyi Yu, Shamma, Nader |
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| Zdroj: | Proceedings of SPIE; 2/16/2019, Vol. 10984, p1-9, 9p |
| Databáze: | Complementary Index |
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