High Temperature Spin on Carbon Materials with Excellent Planarization and Chemical Vapor Deposition Compatibility.
| Autor: | Keren Zhang, Li Cui, Shintaro Yamada, Jim Cameron, Sabrina Wong, Lawrence Chen, Greene, Dan, Coley, Suzanne, Kaitz, Joshua, Iou-Sheng Ke, Popere, Bhooshan, LaBeaume, Paul, Foltz, Benjamin, Lei Zhang, Kearns, Kenneth, Ngunjiri, Johnpeter |
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| Zdroj: | Proceedings of SPIE; 1/23/2019, Vol. 10960, p1-12, 12p |
| Databáze: | Complementary Index |
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