Selective spin-on deposition of polymers on heterogeneous surfaces.
| Autor: | Yuanyi Zhang, D'Ambra, Colton, Katsumata, Reika, Segalman, Rachel A., Hawker, Craig J., Bates, Christopher M. |
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| Zdroj: | Proceedings of SPIE; 1/23/2019, Vol. 10960, p1-10, 10p |
| Databáze: | Complementary Index |
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