High voltage CD-SEM based metrology for 3D-profile measurement using depth-correlated BSE signal.
| Autor: | Wei Sun, Yasunari Sohda, Hiroya Ohta, Taku Ninomiya, Yasunori Goto |
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| Zdroj: | Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-8, 8p |
| Databáze: | Complementary Index |
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