Deep learning's impact on contour extraction for Design Based Metrology and Design Based Inspection.
Autor: | Ryo Yumiba, Masayoshi Ishikawa, Shinichi Shinoda, Shigetoshi Sakimura, Yasutaka Toyoda, Hiroyuki Shindo, Masayuki Izawa |
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Zdroj: | Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-9, 9p |
Databáze: | Complementary Index |
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