Deep learning's impact on contour extraction for Design Based Metrology and Design Based Inspection.

Autor: Ryo Yumiba, Masayoshi Ishikawa, Shinichi Shinoda, Shigetoshi Sakimura, Yasutaka Toyoda, Hiroyuki Shindo, Masayuki Izawa
Zdroj: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-9, 9p
Databáze: Complementary Index