Process drift compensation by tunable wavelength homing in scatterometry-based overlay.
| Autor: | Kun Gao, Herrera, Pedro, Ramanathan, Vidya, Naipak, Victoria, Meng Wang, Renan Milo, Yaziv, Tal, BenDavid, Nir, Chen Dror, Hao Mei, Weihua Li, Xindong Gao, Linfei Gao, Bellah, Md. Motasim, Gutjahr, Karsten, Dongyue Yang, Cheuk Wun Wong, Xueli Hao, Joung, Tony, Park, DeNeil |
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| Zdroj: | Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-7, 7p |
| Databáze: | Complementary Index |
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