Localized Power Spectral Density analysis on Atomic Force Microscopy images for Advanced Patterning applications.

Autor: Moussa, Alain, Saib, Mohamed, Paolillo, Sara, Lazzarino, Frederic, Illiberi, Andrea, Dengb, Shaoren, Maes, Jan Willem, Charley, Anne-Laure, Leray, Philippe
Zdroj: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-8, 8p
Databáze: Complementary Index