Depth Measurement Technique for Extremely Deep Holes using Back-Scattered Electron Images with High Voltage CD-SEM.
| Autor: | Takahiro Nishihata, Mayuka Osaki, Maki Tanaka, Takuma Yamamoto, Akira Hamaguchi, Chihiro Ida, Yusaku Suzuki |
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| Zdroj: | Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-9, 9p |
| Databáze: | Complementary Index |
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