| Autor: |
Mikhaylenko, M. S., Pestov, A. E., Chkhalo, N. I., Goncharov, L. A. |
| Zdroj: |
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Mar2019, Vol. 13 Issue 2, p182-187, 6p |
| Abstrakt: |
The results of testing a new miniature accelerated ion source (KLAN-10M) with a plasma neutralizer are reported. In particular, the operating modes of the source are studied, and the dependences of the ion-beam diameter and the ion current distribution along the output aperture surface on distance are measured. The ion current density with an output-aperture diameter of 7 mm (flat ion optics) is 10.4 mA/cm2, which allows one to precisely correct local errors in the surface shape of the optical components at a low beam divergence (≈15%). The operation of the plasma neutralizer is studied, the resulting electronic current of which provides, for this design, incomplete compensation of the space charge in a beam (the neutralizer current is 10 times less than the current of ions). [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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