Autor: |
Belov, A. N., Golishnikov, A. A., Pestov, G. N., Solnyshkin, A. V., Shevyakov, V. I. |
Zdroj: |
Nanotechnologies in Russia; Nov2018, Vol. 13 Issue 11/12, p609-613, 5p |
Abstrakt: |
In this work, a process solution for the formation of an array of piezo- and pyroelectric structures with the use of a matrix of nanoprofiled silica is demonstrated. It is proposed to use plasma etching through a hard mask of porous anodic alumina for the formation of the matrix. Nanoparticles of a ferroelectric copolymer of vinylidene fluoride with trifluoroethylene are formed in the pores of the matrix. The results of measurements of the piezoelectric and pyroelectric responses of this structure are presented. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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