| Autor: |
Sijbrandij, Sybren, Lombardi, Alexander, Sireuil, Alain, Khanom, Fouzia, Lewis, Brett, Guillermier, Christelle, Runt, Doug, Notte, John |
| Zdroj: |
Microscopy Today; May2019, Vol. 27 Issue 3, p22-27, 6p |
| Abstrakt: |
By combining a focused inert-gas ion beam instrument and a custom magnetic-sector mass spectrometer, high spatial resolution imaging and chemical analysis are provided within a single instrument. Sub-nanometer image resolution is achieved by secondary electron (SE) imaging, limited only by the probe-size of the primary beam, while the spatial resolution for chemical mapping obtained via secondary ion mass spectrometry (SIMS) is limited mainly by beam-sample interactions to about 10 nm. This article introduces the background behind this development, describes the instrument and its various operating modes, and presents examples of its applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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