Fabrication of Double Layer Anti Reflection Coating TiO2-SiO2 on Silicon Substrate with Pulsed Laser Deposition Method.
| Autor: | Nelwan, Eframoktora R. G., Suliyanti, Maria M., Prastomo, Niki |
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| Zdroj: | Proceedings of SPIE; 4/17/2019, Vol. 11044, p1-6, 6p |
| Databáze: | Complementary Index |
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