Quantitative Aspects of PLAD Sidewall Doping Characterization by SIMS and APT.
Autor: | Thuvander, Mattias, Meisenkothen, Frederick, Sha, Gang, Kouzminov, Dimitry, Cournoyer, James, Norasetthekul, Somchintana, Muthuraman, Harish, Gao, Qi |
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Zdroj: | Microscopy & Microanalysis; Apr2019, Vol. 25 Issue 2, p511-516, 6p |
Databáze: | Complementary Index |
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