Quantitative Aspects of PLAD Sidewall Doping Characterization by SIMS and APT.

Autor: Thuvander, Mattias, Meisenkothen, Frederick, Sha, Gang, Kouzminov, Dimitry, Cournoyer, James, Norasetthekul, Somchintana, Muthuraman, Harish, Gao, Qi
Zdroj: Microscopy & Microanalysis; Apr2019, Vol. 25 Issue 2, p511-516, 6p
Databáze: Complementary Index