Impact of Sequential Infiltration Synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning.
| Autor: | Vanelderen, Pieter, Blanco, Victor, Ming Mao, Tomczak, Yoann, de Roest, David, Kissoon, Nicola, Rincon Delgadillo, Paulina, Rispens, Gijsbert, Schiffelers, Guido, Pathak, Abhinav, Lazzarino, Frederic, De Simone, Danilo, de Poortere, Etienne, Mc Manus, Moyra, Piumi, Daniele, Hendrickx, Eric, Vandenberghe, Geert |
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| Zdroj: | Proceedings of SPIE; 1/20/2019, Vol. 10957, p109570S-1-109570S-15, 15p |
| Databáze: | Complementary Index |
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