OPC strategies to reduce failure rates with rigorous resist model stochastic simulations in EUVL.
| Autor: | Pret, Alessandro Vaglio, Graves, Trey, Blankenship, David, Robertson, Stewart A., Lee, Patrick, Biafore, John J. |
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| Zdroj: | Proceedings of SPIE; 1/20/2019, Vol. 10957, p109570J-1-09570J-9, 9p |
| Databáze: | Complementary Index |
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