Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment.

Autor: Michele Calvo, Sylvain Guerber, Guillaume Beaudin, Michael Canva, Pedro Rojo Romeo, Charles Baudot, Frederic Bœuf, Paul G. Charette, Régis Orobtchouk, Stéphane Monfray
Zdroj: Japanese Journal of Applied Physics; Apr2019, Vol. 58 Issue SB, p1-1, 1p
Abstrakt: This paper reports on the design and characterization of a silicon nitride ring resonator-based device for biosensing manufactured with the STMicroelectronics 300 mm R&D Datacom Advanced PHotonic Nanoscale Environment (DAPHNE) industrial platform. The experimental results demonstrate a 300 nm/RIU bulk sensitivity and a 0.125 nm resonant peak shift per nanometer of biological adlayer thickness change. These results, comparable to the state of the art in ring resonator-based biosensors, demonstrate the potential of the DAPHNE industrial platform for manufacturing high-performance photonics biosensors at low cost. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index