Research of the microelectromechanical switch with different materials of metal membrane.
| Autor: | Lysenko, Igor E., Tkachenko, Alexey V., Ezhova, Olga A. |
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| Zdroj: | Proceedings of SPIE; 3/26/2019, Vol. 11022, p1-12, 12p |
| Databáze: | Complementary Index |
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