Experimental Study on Non-linear Calibration of Two-dimensional Nano-positioning Stage.

Autor:	Zhou Qi, Li-Qi, Shi-Yu-shu, Li-Shi, Huang Lu, Gao Si-tian
Zdroj:	Proceedings of SPIE; 4/26/2019, Vol. 11053, p1-8, 8p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu