VOn Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy.

Autor:	Kot, D., Kissinger, G., Dabrowski, J., Sattler, A.
Zdroj:	ECS Journal of Solid State Science & Technology; 2018, Vol. 7 Issue 12, pP707-P710, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu