Silicon doping of GaP layers grown by time-modulated PECVD.

Autor: A I Baranov, I A Morozov, A V Uvarov, G E Yakovlev, J-P Kleider
Zdroj: Journal of Physics: Conference Series; 2019, Vol. 1124 Issue 4, p1-1, 1p
Databáze: Complementary Index