| Autor: |
Shugurov, Artur, Panin, Alexey, Akulinkin, Alexandr, Kasterov, Artur, Kalashnikov, Mark, Kuzminov, Evgenii |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 2018, Vol. 2051 Issue 1, p020283-1-020283-4, 4p, 1 Diagram, 2 Charts, 2 Graphs |
| Abstrakt: |
The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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