EUV sensitizer for resists and spin-on-carbon materials.
| Autor: | Takashi Sato, Yuta Togashi, Sachiko Shinjo, Takumi Toida, Takashi Makinoshima, Masatoshi Echigo |
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| Zdroj: | Proceedings of SPIE; 8/25/2018, Vol. 10809, p108091X-1-108091X-16, 16p |
| Databáze: | Complementary Index |
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