Development of full-size EUV pellicle with thermal emission layer coating.
| Autor: | Juhee Hong, Chulkyun Park, Changhun Lee, Keesoo Nam, Yongju Jang, Seongju Wi, Jinho Ahn |
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| Zdroj: | Proceedings of SPIE; 8/25/2018, Vol. 10809, p108090R-1-108090R-4, 4p |
| Databáze: | Complementary Index |
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