Design, fabrication and on-the-die characterization of a MEMS tuning-fork gyroscope.
| Autor: | Reddy, Jayaprakash, Pratap, Rudra |
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| Zdroj: | ISSS Journal of Micro & Smart Systems; Oct2018, Vol. 7 Issue 2, p87-96, 10p |
| Databáze: | Complementary Index |
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