AC dielectric properties of SiO2 thin layers implanted with In and Sb ions.

Autor: Czarnacka, Karolina, Koltunowicz, Tomasz N., Fedotov, Aleksander K.
Zdroj: Proceedings of SPIE; 8/24/2018, Vol. 10808, p1-7, 7p
Databáze: Complementary Index