The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry.
| Autor: | Bourzgui, S., Georges, G., Roussy, A., Blue, J., Faivre, E., Pinaton, J. |
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| Zdroj: | Proceedings of SPIE; 6/27/2018, Vol. 10750, p1-8, 8p |
| Databáze: | Complementary Index |
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