Development of digital micromirror devices (DMDs) for far-UV applications.
| Autor: | Vorobiev, Dmitry, Del Hoyo, Javier, Quijada, Manuel, Travinsky, Anton, Raisanen, Alan D., Irwin, Alexis, Ninkov, Zoran |
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| Zdroj: | Proceedings of SPIE; 5/14/2018, Vol. 10706, p1-9, 9p |
| Databáze: | Complementary Index |
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