Electrical and Optical Properties of Ga-Doped ZnO Thin Films Prepared by a Polymer-Assisted Solution Process.

Autor: Jiyeon Yang, Jihoon Kim
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Zdroj: Journal of Imaging Science & Technology; Jul/Aug2018, Vol. 62 Issue 4, p1-6, 6p
Abstrakt: Ga-doped zinc oxide (GZO) transparent conducting thin films were prepared by a polymer-assisted solution (PAS) process. The Ga concentration in the film was varied from 1 to 5 at.% by adjusting the mixing ratio of Zn- and Ga-source solutions formulated by coordinating Zn- and Ga-anionic complexes with a water-soluble polymer. The GZO-source solutions were spin-coated on glass substrates and heat-treated at elevated temperatures. The optimum Ga concentration was investigated by analyzing the electrical and optical properties of the PAS-coated films. The GZO film with 1 at.% Ga showed the lowest resistivity of 7:49×10-2-cm and an optical transmittance of 85% at 550 nm with a film thickness of 107 nm. X-ray diffraction analysis revealed that the PAS-coated GZO films had the wurtzite crystal structure with a preferred orientation of (002). Higher post-annealing temperatures resulted in larger grain sizes and discontinuities were observed among the grains in the films. Multiple spin-coating steps were employed to increase the film thickness, resulting in the reduction in the sheet resistance of the PAS-coated GZO films from 7:0 k=sq. (single layer of GZO) to 0:7 k=sq. (four layers of GZO) without noticeable reduction in film transmittance. c 2018 Society for Imaging Science and Technology. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index