Time resolved detection of particle contamination during thin film deposition.
| Autor: | Rüsseler, Anna Karoline, Balasa, Istvan, Kricheldorf, Hans-Ulrich, Vergöhl, Michael, Jensen, Lars, Ristau, Detlev |
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| Zdroj: | Proceedings of SPIE; 4/29/2018, p1-9, 9p |
| Databáze: | Complementary Index |
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