Alternative Spin-On-Glass (SoG) material characterization For Deep-Submicron (<0.35 um) soft reflow fabrication process.
| Autor: | F Packeer, M A M Zawawi, N Z I Hashim, N M Noh, W M Jubadi, M Missous |
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| Zdroj: | IOP Conference Series: Materials Science & Engineering; Jun2018, Vol. 380 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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