Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers.
| Autor: | Sandner, Thilo, Gaumont, Eric, Grasshoff, Thomas, Auböck, Gerald, Kenda, Andreas, Gisler, Thomas, Langa, Sergiu, Herrmann, Andreas, Grahmann, Jan |
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| Zdroj: | Proceedings of SPIE; 11/17/2017, Vol. 10454, p1-12, 12p |
| Databáze: | Complementary Index |
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