Investigation of hydrogen induced changes in SrBi2Ta2O9 ferroelectric films.

Autor: Zafar, Sufi, Kaushik, Vidya, Laberge, Paul, Chu, Peir, Jones, Robert E., Hance, Robert L., Zurcher, Peter, White, Bruce E., Taylor, Deborah, Melnick, Bradley, Gillespie, Sherry
Předmět:
Zdroj: Journal of Applied Physics; 11/1/1997, Vol. 82 Issue 9, p4469, 6p, 9 Black and White Photographs, 1 Diagram, 1 Chart, 3 Graphs
Abstrakt: Investigates the effect of hydrogen on strontium bismuth tantalate ferroelectric capacitors. Use of x-ray diffraction, electron diffraction, Auger electron, scanning and transmission electron microscopies; Studying of changes in the ferroelectric films as a function of annealing gas and temperature; Identification of the mechanism for hydrogen induced damage to the capacitor.
Databáze: Complementary Index