Characterization of metal line--width variation in via first dual damascene approach and its modeling using machine learning artificial neural network algorithms.
| Autor: | Cantù, Pietro, Catarisano, Chiara, Corneo, Nicoletta, Dundulachi, Alessandro, Litterio, Emma, Mantovani, Valeria, Patelmo, Matteo, Triulzi, Benedetta |
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| Zdroj: | Proceedings of SPIE; 1/16/2018, Vol. 10588, p1-11, 11p |
| Databáze: | Complementary Index |
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