Cross-platform (NXE-NXT) machine-to-machine overlay matching supporting next node chip manufacturing.
Autor: | Thijssen, Theo, Beckers, Marcel, Mollema, Albert, Levasier, Leon, Padi, Alexander, Chia-Wei Hung, Hsiao-Lan Chen, van Bokhoven, Laurens, Lammers, Niels, van Damme, Jean Philippe, Teeuwisse, Floris, Tijssen, Robin, Tzeng, Wilson, Wang, Cathy, Mastenbroek, Marcel, Vos, Harald, Ting-Ju Yueh, Miao-Chi Chen, Hsueh-Hung Wu, Shin-Rung Peng |
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Zdroj: | Proceedings of SPIE; 1/15/2018, Vol. 10587, p1-8, 8p |
Databáze: | Complementary Index |
Externí odkaz: |