Effects of fluorine contamination on spin-on dielectric thickness in semiconductor manufacturing.
| Autor: | Hyoung-ryeun Kim, Soonsang Hong, Samyoung Kim, Changyeol Oh, Sung Min Hwang |
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| Zdroj: | Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-6, 6p |
| Databáze: | Complementary Index |
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