Pillars fabrication by DSA lithography: material and process options.
| Autor: | Gharbi, A., Pimenta-Barros, P., Saouaf, O., Reynaud, G., Pain, L., Tiron, R., Navarro, C., Nicolet, C., Cayrefourcq, I., Perego, M., Perez-Murano, F., Amat, E., Fernandez-Regulez, M. |
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| Zdroj: | Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-7, 7p |
| Databáze: | Complementary Index |
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