EUV contact-hole local CD uniformity optimization for DRAM Storage Node application.
| Autor: | Mijung Lim, Chang-Moon Lim, Chang-Nam Ahn, Nak Seong, Park, Daniel, Fumar-Pici, Anita |
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| Zdroj: | Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-8, 8p |
| Databáze: | Complementary Index |
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